TEL Tokyo Electron 3Z80-000665-V1 Control Box
Brand:TEL Tokyo Electron
Model:3Z80-000665-V1
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details
TEL Tokyo Electron 3Z80-000665-V1 Control Box
Product manual:
Product model: TEL Tokyo Electron 3Z80-000665-V1
type: Control Box
Functional positioning: Integrated control unit in semiconductor manufacturing equipment, used for equipment operation and signal management
1、 Product Function Overview:
The 3Z80-000665-V1 control box is an integrated electronic control device designed by Tokyo Electron (TEL),
Mainly used for local control and centralized signal management of semiconductor equipment.
This control box integrates multiple signal interfaces, switch control, power management, and other functions,
Provide stable control signals and operational interfaces for device subsystems.
2、 Main application areas:
Local control unit for semiconductor equipment
In specific areas of the equipment (such as gas supply, pump control, valve management)
Implement centralized control and status feedback.
Signal interface and allocation
Integrate multiple digital and analog signal interfaces to achieve sensor signal acquisition and actuator control signal distribution.
Equipment operation interface
Equipped with buttons, switches or indicator lights for on-site operators to manually control and monitor the status of the equipment.
Power management
Provide stable power supply and protection to ensure reliable transmission of control signals.
Modular equipment system integration
As a component of the device control system, it achieves communication and collaboration with the main control system and other modules.
Product details picture:

3Z80-000665-V1
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