TEL Tokyo Electron 3Z89-000012-11 Power Rack

Brand:TEL Tokyo Electron
Model:3Z89-000012-11
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
Please contact Yvonne for quotation, thank you!

Details

TEL Tokyo Electron 3Z89-000012-11 Power Rack

Product manual:

1、 Product functional positioning
The 3Z89-000012-11 power rack is a core subsystem used for centralized power supply, distribution, and power module integration in Tokyo Electron semiconductor equipment.
It provides stability for the overall control system, drive module, sensor unit, etc
A safe power environment with good electromagnetic isolation and modular support capabilities.

2、 Main application areas
1. Power management core of semiconductor manufacturing equipment
Applicable device types:

Lithography machine

Etcher (Etcher)

CVD/PVD thin film deposition system

Wafer cleaning and processing equipment

Main tasks:

Integrate multiple power modules (such as DC, AC/DC conversion, voltage stabilization, etc.)

Provide multiple stable power sources (such as 5V, 12V, 24V, 48V) for output

Support redundant configuration and hot swappable maintenance

2. Multi module power supply platform inside the device
Centralized power supply: providing the required power supply for subsystems such as controllers, interface boards, sensor modules, drivers, etc. in a unified manner;

Multi voltage output: meets the working voltage requirements of different control units and simplifies the wiring structure;

Power allocation and protection: equipped with fuses, current protection, and overvoltage/overheating protection mechanisms to ensure the safe operation of the system.

3. Modular system architecture support platform
Slot structure: supports quick insertion and replacement of power modules;

Easy to expand: easy to add new power supply units according to device configuration;

Standard communication support: Some versions may integrate power status monitoring and remote communication functions, which can be integrated with the main control system to achieve power status monitoring and alarm.