TEL Tokyo Electron 408-500111-3 Automatic Loader Board

Brand:TEL Tokyo Electron
Model:408-500111-3
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron 408-500111-3 Automatic Loader Board

Product manual:

TEL Tokyo Electron 408-500111-3 Automatic Loader Board
It is a dedicated control circuit board used in the semiconductor manufacturing equipment of Tokyo Electronics (TEL) to control the automatic wafer loading/unloading device.
This board is usually installed in Front End Modules (FEM) or automated handling systems,
Realize high-precision transfer between FOUP/SMIF and process chambers.

1、 Product Overview
Project Content
Product Name: Auto Loader Board
Product model 408-500111-3
Manufacturer Tokyo Electron Ltd
Installation location: Inside the wafer automatic handling system/front-end module control unit
Control and status management of functional positioning wafer loading and unloading mechanism

2、 Core functions
Automatic loading control

Control the robotic arm, lifting platform, vacuum adsorption system, etc. to complete the automatic wafer loading action;

Manage precise actions such as docking of crystal round boxes, opening/closing of cabin doors, and alignment of wafers.

Action signal output and feedback acquisition

Output multiple drive signals to drive stepper motors or servo systems to perform handling actions;

Collect sensor feedback, such as position sensors, alignment sensors, access control status, etc.

Status monitoring and exception handling

Real time monitoring of the working status of the automatic loading system, supporting interrupt, alarm, and self diagnostic functions;

Ensure the reliability and safety of the wafer handling process.

3、 Typical application areas
TEL Coater/Developer: Automatically loads wafers into spin coating/development chambers;

Etcher and Cleaner: Control the precise transfer of wafers from the front end to the cavity;

The connection bridge between the front-end module (FEM) and the central control system.