TEL Tokyo Electron 481-500111-2 Main Controller Module

Brand:TEL Tokyo Electron
Model:481-500111-2
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron 481-500111-2 Main Controller Module

Product manual:

Product model: TEL Tokyo Electron 481-500111-2
Type: Main Controller Module
Functional positioning: The core control unit of semiconductor manufacturing equipment, responsible for the management and coordinated control of the overall process flow

1、 Product Function Overview:
The 481-500111-2 main controller module is the central processor core in Tokyo Electron (TEL) semiconductor equipment,
Responsible for executing control logic, scheduling various subsystems, processing input and output signals, and achieving precise control over the entire equipment process flow.
It adopts an embedded system platform, integrates multiple interface protocols, and supports efficient communication with sensors, drivers, I/O modules, etc.

2、 Main application areas:
Overall control of equipment process flow

Control the execution sequence and process parameters of multi-step processes such as etching, deposition, cleaning, and heat treatment.

System task scheduling and logic control

Coordinate and control subsystems such as valves, pumps, and robotic arms to achieve stable and efficient equipment operation.

I/O and Communication Interface Management

Manage digital/analog input/output signals and support communication connections with external modules such as display boards, operation panels, and upper computers.

Data processing and monitoring feedback

Real time monitoring of sensor data, execution of feedback control algorithms to ensure stable temperature, pressure, flow rate, and other parameters within the target range.

Alarm and system protection functions

Detect abnormal states and trigger alarms, implement system protection measures such as safe shutdown and power-off protection.