TEL Tokyo Electron 5012-000062-11 Sensor Module

Product manual:

TEL Tokyo Electron 5012-000062-11 Sensor Module
It is a key electronic component used in Tokyo Electron semiconductor manufacturing equipment to monitor environmental parameters and process status.
This module integrates multiple sensor interfaces for real-time collection of various physical quantities within the device or process flow,
Such as temperature, pressure, humidity, etc., to ensure the accuracy and stability of equipment operation.

The following is a detailed description of the functions and application areas of the sensor module (without patterns):

1、 Basic Information
Product model: 5012-000062-11

Product Name: Sensor Module

Manufacturer: Tokyo Electron Ltd. (TEL)

Module category: Sensor signal acquisition and processing module

2、 Main functions
Multiple sensor signal acquisition

Support input of signals from various sensors such as temperature sensors, pressure sensors, humidity sensors, etc;

Capable of analog signal acquisition and digital signal conversion.

Signal Processing and Filtering

Filter, amplify, and convert the collected sensor signals to improve their accuracy and stability;

Support real-time monitoring to ensure accurate feedback of process parameters.

Data transmission interface

Transmit the processed signals to the main control system through industrial standard interfaces or TEL specific communication protocols;

Support multi-channel input to meet the monitoring requirements of complex processes at multiple points.

Status monitoring and alarm support

Equipped with status indication and abnormal alarm output functions to enhance equipment safety;

Support automatic fault detection and feedback.

3、 Typical application areas
Etcher equipment
Monitor the temperature, pressure, and gas flow inside the chamber to ensure process stability.

Chemical Vapor Deposition Equipment (CVD/ALD)
Collect temperature, pressure, and humidity parameters of the reaction chamber to achieve precise control.

Cleaning system (Wet Bench)
Monitor the liquid level, temperature, and chemical concentration to ensure the effectiveness of the cleaning process.

Conveyor and Load Port System (EFEM/Load Port)
Monitor environmental parameters to prevent static electricity and pollution risks.

Product details picture:

5012-000062-11

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