TEL Tokyo Electron 5044-000158-11 Controller Module

Product manual:

Product Name: 5044-000158-11 Controller Module
Manufacturer: Tokyo Electron Ltd
Product Type: Device Controller Module

1、 Product Overview
5044-000158-11 is a dedicated controller module used in Tokyo Electron semiconductor manufacturing equipment,
Usually serving as a key control core role in a subsystem or functional area, with signal acquisition, control execution
Multiple functions such as data communication and status management are commonly used to achieve closed-loop control in automated process flows.

2、 Main functions
Logic control function

Execute fixed or programmable control logic to process control signals from sensors, actuators, or main control systems.

Data acquisition and signal processing

Receive and process analog or digital input signals (such as temperature, pressure, position, switch status, etc.).

Actuator driver

Control the actions of executing components such as solenoid valves, motors, and heating units, including functions such as start stop, speed regulation, and positioning.

communication function

High speed data exchange with the main controller, upper computer or other modules, interface forms may include RS-232/485, Ethernet, CAN bus, etc.

System monitoring and fault alarm

Real time monitoring of system operation status, providing alarm outputs in the form of LED or digital signals.

3、 Typical applications
This controller module is suitable for local or unit control of the following TEL devices:

Etcher (etching machine)

CVD/PVD (Thin Film Deposition) System

Track system (coating/developing)

Load Lock/Transfer module

Vacuum chamber control, air valve control, power management unit, etc

Product details picture:

data table

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