TEL Tokyo Electron 808-52170-3 Printed Circuit Board
Brand:TEL Tokyo Electron
Model:808-520170-3
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details
TEL Tokyo Electron 808-52170-3 Printed Circuit Board
Product manual:
product name
TEL Tokyo Electron 808-52170-3 Printed Circuit Board
Type: PCB Control Board/Interface or Logic Circuit Board
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Product Function Overview
This circuit board is a core electronic module in TEL semiconductor manufacturing equipment,
Usually used for the following purposes:
As a carrier platform for signal processing, logic control, or power regulation circuits
Implement communication and data exchange between the control system and the execution unit
Logical judgment, buffering, isolation, or filtering of input/output signals
Support connection and coordinated control between external sensors, actuators, or other boards
2、 Typical application areas
1. Semiconductor Etching Systems
Control the plasma generator, vacuum chamber valves, power status, etc
As the signal relay and judgment logic core of the etching system
2. Thin film deposition equipment (CVD/ALD/PVD)
Used to control key components such as gas proportional valves, heaters, pressure sensors, etc
Realize dynamic adjustment of temperature, flow rate, and pressure
3. Wafer Handling System
Control the handling robot arm, motor drive, sensor feedback, etc
Ensure accurate and safe transfer of wafers between process chambers
4. Auxiliary daughter board in the main control unit of the system
Provide signal conversion and interface bridging for main CPU board, communication board, etc
Support digital and analog input/output
5. Cleaning and Drying System (Wet Bench/Scrubber)
Control the operating logic of nozzles, heaters, flow pumps, etc
Realize process control automation
3、 Product technical characteristics (based on TEL standard PCB specifications)
Multi layer board design with good EMI shielding and grounding layout
Install standard industrial grade ICs, capacitors, resistors, and interface connectors
This may include:
Optocoupler isolation circuit
RELAY CONTROL
Analog signal conditioning module
logic gates
Equipped with TEL specific system identification code and firmware interface (applicable to TEL dedicated architecture)
Product details picture:
808-520170-3
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