TEL Tokyo Electron BX80-070382-13 Interface Module

Product manual:

1、 Basic Information
Product model: BX80-070382-13

Product Name: Interface Module

Manufacturer: Tokyo Electron Limited (TEL)

Module category: Signal interface conversion and communication module

Version number: -13 (indicating the 13th hardware or firmware revision of the module)

2、 Main functions
This interface module is mainly used for signal conversion, interface expansion, and communication bridging between different control systems within the device. Its functions include:

Functional classification description
Signal conversion converts multiple input signal formats into standard signals recognizable by the device
Interface expansion expands the number of input and output ports for devices, supporting more sensors and actuators
Communication bridging supports multiple industrial communication protocols to achieve data interoperability between different systems
Signal isolation and electrical isolation prevent interference, ensuring stable and reliable signal transmission
The status indicator is equipped with LED and other indicator lights, which display the real-time working status and fault information of the module

3、 Typical application areas
This module is commonly used in complex control systems in TEL semiconductor manufacturing equipment, including:

Pre - and post-processing systems for lithography equipment (such as ACT series)

Connect sensors, actuators, and upper control systems to coordinate process actions

Etching and deposition equipment (such as Tactras, Trias)

Implement interfaces for subsystems such as gas flow control, vacuum monitoring, and temperature acquisition

Handling and automation module

Centralized management of signals for robotic arm control, access control interlocking, and alarm systems

4、 Module features
Supports multiple signal input and output types, with a wide range of applications

High reliability design, suitable for long-term continuous operation in clean room environments

Hardware version "-13" usually indicates that it has undergone multiple optimizations and is compatible with the latest device configurations

Compact structure, easy to install and maintain

Highly integrated with TEL equipment and systems to ensure overall performance stability

Product details picture:

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