TEL Tokyo Electron BX81-070082-12 Interface Module

Brand:TEL Tokyo Electron
Model:BX81-070082-12
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron BX81-070082-12 Interface Module

Product manual:

BX81-070082-12 Interface Module
Manufacturer: Tokyo Electron Ltd. (TEL)
Category: Interface Module

1、 Function Overview
The BX81-070082-12 interface module is used in semiconductor equipment as a signal bridging component between the system control unit and peripheral execution or sensing devices. Its main functions include:

Realize signal interaction between the main control board and sensors, actuators, drivers, etc

Provide centralized management of digital input/output, analog signals, and communication signals

Adapt, level convert or buffer signals to enhance system anti-interference performance

Support interlocking control and modular signal access to enhance system stability and maintainability

2、 Typical application areas
BX81-070082-12 is mainly used in the system part of TEL equipment that requires multi-point signal acquisition and control output. Common applications include:

1. Wafer Transfer Module
Connect the motor, photoelectric switch, and limit sensor

Realize multi axis action coordination control

2. Gas control/supply module
Connect components such as MFC (Mass Flow Controller), pressure switch, solenoid valve, etc

Realize precise control and interlocking safety logic of process gases

3. Loadlock module or cavity control unit
Manage signal access for devices such as vacuum valves, door control actuators, pressure sensors, etc

Used for status judgment and action triggering in the automatic operation process of equipment

4. Cleaning, drying, and liquid processing areas
Connect chemical liquid flow path, electric heating device, pump driver

Realize signal control and feedback of temperature, flow rate, liquid level, etc