TEL Tokyo Electron BX81-070097-13 Valve Controller

Product manual:

Product Name: BX81-070097-13 Valve Controller
Manufacturer: Tokyo Electron Ltd
Product type: Valve Controller Module

1、 Product Overview
BX81-070097-13 is a pneumatic control module used in Tokyo Electron semiconductor manufacturing equipment,
Mainly used for precise control of valve opening and closing, flow regulation, and feedback monitoring,
Ensure stable and safe gas delivery in the chamber or process pipeline, and meet the precise requirements of the process environment.

2、 Core functions
Air valve control

Control the opening and closing of multiple solenoid valves and proportional valves through electrical signals, and regulate the flow rate and pressure in process gases or vacuum pipelines.

Status feedback management

Real time collection of valve switch status and position feedback signals, and uploading them to the upper computer system or PLC for logical judgment and closed-loop control.

communication function

Data exchange and remote control with the main control system through serial bus, TTL or TEL proprietary protocols.

Fault detection and alarm

The module has self diagnostic capability, and can output real-time alarm signals in case of valve abnormalities (jamming, loss of control, disconnection, etc.).

3、 Typical application devices
This valve controller is commonly used in the following TEL series equipment:

CVD/PVD equipment (chemical vapor deposition, physical vapor deposition)

Etcher etching equipment

Cleaning system (Cleaner/Ashing)

Vacuum environment management system (valve array, gas panel)

Gas Mass Flow Control (MFC) Collaborative System

Product details picture:

BX81-070097-13

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