TEL Tokyo Electron BX81-070098-14 Controller Module

Product manual:

1、 Basic Product Information
Product model: BX81-070098-14

Product Name: Controller Module

Manufacturer: TEL (Tokyo Electron Limited, Tokyo Electronics, Japan)

Module series: BX81 series

Version number: Revision 14 (indicating that this module is the 14th revision or corresponds to a specific device configuration)

2、 Function and purpose
The BX81-070098-14 controller module is an important control component inside TEL semiconductor equipment, mainly used for the following functions:

Function Description
Subsystem control controls the startup and action logic of key subunits such as motors, actuators, gas valves, sensors, etc.
Signal communication receives instructions from the upper system, executes them, and provides feedback on status information to achieve closed-loop control.
Data processing involves processing real-time data from sensors or other modules and making responsive control decisions.
Interface bridging serves as an intermediate bridge between the device control system and the peripheral submodules, enabling signal distribution and integration.
System coordination participates in the synchronization and coordination between multiple modules of the equipment, improving the efficiency and stability of system operation.

3、 Application Fields
The BX81-070098-14 controller module is mainly used in the following types of TEL semiconductor manufacturing equipment:

Photolithography pre-processing/post-processing equipment (such as Clean Track ACT series)

Control the rotating coating station, developing pump, vacuum fixture, temperature control unit, etc.

Cleaning/developing system

Manage sprinkler systems, flushing valves, drain valves, and heating plate control systems.

Vacuum/gas control system

Control the chamber door, vacuum pump start stop, pressure balance valve, dry gas channel, etc.

Equipment linkage interface

Works in conjunction with the main control computer and other functional modules (such as I/O boards and driver boards).

Product details picture:

BX81-070098-14

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