TEL Tokyo Electron BX81-070100-12 Sensor Board

Product manual:

Product model: BX81-070100-12
Manufacturer: Tokyo Electron Ltd. (TEL)
Component type: Signal acquisition module/sensor interface circuit board

1、 Product Overview:
BX81-070100-12 is a sensor board used internally in Tokyo Electron (TEL) equipment,
Its main function is to collect electrical signals from various sensors, and perform preliminary processing, amplification, filtering, or conversion before transmitting them to the main control system.
It is one of the important links for precision control and state perception of equipment.

This type of sensor board is commonly used to detect key parameters of equipment, such as position, pressure, temperature, airflow, chamber status, etc.

2、 Functional features:
Function type description
Signal acquisition, reception, and processing of external sensor signals (analog or digital)
Signal conditioning includes functions such as filtering, amplification, isolation, and level conversion
Data transmission sends the processed signal to the TEL main control system (such as CPU, control motherboard)
Real time feedback and alarm support for various sensor statuses during process operation through status monitoring

3、 Possible supported sensor types (based on TEL universal design speculation):
Sensor type application instructions
Optoelectronic sensor wafer detection, door switch position judgment
Pressure sensor chamber vacuum pressure detection
Temperature sensor hot plate, heating area temperature control feedback
Displacement sensor control arm or platform position monitoring
Flow sensor for gas or liquid channel flow monitoring

4、 Technical parameters (estimated according to TEL standards):
Project Content
Input signal type: analog signal (0-5V, 4-20mA), digital signal (TTL, switch quantity)
Number of channels: Multi channel input (such as 4/8 channels)
Isolation design optocoupler or magnetic isolation to prevent interference
The processed signal is output through a backplane or dedicated connector
The power requirement is usually 5V or 12V DC power supply
Installation method: plug-in or screw fixed installation in TEL rack

Product details picture:

BX81-070100-12

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