TEL Tokyo Electron CS114-000733-1 Temperature Controller

Product manual:

1、 Basic Information
Product model: CS114-000733-1

Product Name: Temperature Controller

Manufacturer: Tokyo Electron (TEL)

Product Type: Specialized Industrial Temperature Controller

Application field: Used for temperature monitoring and regulation in semiconductor manufacturing equipment

2、 Main functions
Temperature measurement: Collect temperature signals from key parts such as heaters, heating plates, and furnaces

Temperature regulation: Control the power of heating elements according to set parameters to achieve precise temperature control

Alarm function: When the temperature exceeds the set range, an alarm is triggered to ensure the safe operation of the equipment

Multi channel support: may support multiple temperature sensor inputs to achieve multi-point temperature control

Communication interface: connected to the main control system of the device, real-time transmission of temperature data and status

3、 Typical application areas
Pre - and post-processing equipment for lithography machines (such as coating and developing systems)

Heating control in thin film deposition equipment (CVD, PVD systems)

Temperature management of etching equipment

Wafer heating/baking module

4、 Technical features
High precision temperature acquisition and control to ensure process stability

Industrial grade design, suitable for clean rooms and complex process environments

Compatible with multiple types of temperature sensors (thermocouples, RTDs, etc.)

Stable and reliable output control, supporting advanced control algorithms such as PID

Product details picture:

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