TEL Tokyo Electron CT2980-092273-11 Sensor Module

Brand:TEL Tokyo Electron
Model:CT2980-092273-11
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron CT2980-092273-11 Sensor Module

Product manual:

Product Name:
TEL Tokyo Electron CT2980-092273-11 Sensor Module
（Sensor Module）

Product definition and functionality:
This module is a high-precision sensor integration unit used by Tokyo Electron in its semiconductor equipment,
Used for real-time monitoring of equipment operating status or processing environment parameters. Its core functions include:

Detection and collection: Monitor key physical quantities (such as position, temperature, pressure, vacuum degree, flow rate, alignment status, etc.)

Signal conversion: Convert analog signals into digital signals and transmit them to the control system

Data feedback: Provide real-time feedback for closed-loop control and equipment protection

Integrated communication: communicates with the main control system, PLC or I/O module, supports internal logical linkage of equipment

Main application areas:
1. Wafer processing monitoring
Used for detecting the position and status of wafers during transportation, loading, alignment, and other processes

Frequently used in conjunction with EFEM, Load Port, and Transfer Module to improve operational accuracy and stability

2. Vacuum/gas control system
Monitor the vacuum degree, gas flow rate, or pressure changes inside the chamber

Linkage with MFC (Mass Flow Controller), vacuum valve and other equipment to achieve safety interlock control

3. Temperature and environmental monitoring
Temperature detection for heating modules, cooling devices, or plasma processing areas

Ensure that the process parameters operate within a stable range

4. Automated fault diagnosis and alarm
Implement fault state detection (such as door not closed, alignment failure, abnormal air pressure)

Support device self check, remote alarm, and logging functions