TEL Tokyo Electron CT5085-430221-15 rotator

Product manual:

TEL Tokyo Electron CT5085-430221-15 rotator
Category: Mechanical Rotating Components/Rotator
Manufacturer: Tokyo Electron Ltd. (TEL)

1、 Product Function Overview
This rotator is a precision mechanical actuator used in semiconductor manufacturing equipment, mainly responsible for:

Accurately control the rotational position and speed of wafers or related workpieces

Cooperate with robotic arms and sensors to achieve wafer alignment, handling, flipping, and other actions

Ensure the smoothness and repeated positioning accuracy of the rotation process

Support collaborative work with drivers and control systems to achieve closed-loop control

2、 Typical application areas
Wafer transfer and loading system

Realize wafer rotation in Loadport, Transfer Module, or Robot arm

Easy alignment and placement of wafer and equipment interfaces

Lithography and exposure equipment

Control wafer rotation to achieve multi angle exposure or alignment

Ensure precise pattern overlay and position correction

Etching and deposition process equipment

Rotate the wafer to achieve uniform etching or deposition effect

Control rotation speed to ensure process stability

Testing and Inspection Equipment

Rotating workpieces for multi angle detection or optical measurement

3、 Product Technical Characteristics
High precision rotating bearings ensure smooth and seamless rotation

Support multi rate regulation and programmable control

Compact structure, easy to integrate into narrow spaces of equipment

Compatible with industrial standard driver interfaces, can be used in conjunction with servo motors and other actuators

Design to meet the requirements of clean rooms and high stability environments

4、 Advantages of use
Improve the accuracy and repeatability of device actions

Optimize process consistency in wafer processing

Reduce mechanical wear and extend equipment lifespan

Support efficient operation and convenient maintenance of automated equipment

Product details picture:

CT5085-430221-15

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