TEL Tokyo Electron CX81-050023-12 Input/Output Module
Brand:TEL Tokyo Electron
Model:CX81-050023-12
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details
TEL Tokyo Electron CX81-050023-12 Input/Output Module
Product manual:
1、 Basic Information
Product model: CX81-050023-12
Product Name: Input/Output Module
Manufacturer: Tokyo Electron Ltd
Module type: Multi channel digital/analog I/O module
Equipment: Control systems commonly used in Tokyo Electron semiconductor manufacturing equipment, such as etching machines, cleaning machines, thin film deposition equipment (CVD, PVD), etc.
2、 Functional positioning
Equipment signal input/output interface
Receive input signals from device sensors, buttons, switches, etc
Output control commands to executing components such as valves, electromagnetic relays, fans, pumps, etc
The bridge between the main control system and the on-site equipment
Connect the main controller of TEL (such as PLC or control motherboard) with the actual process module to achieve the implementation of control logic
State acquisition and logic drive
Used for collecting switch signals (DI), outputting relay control signals (DO), or processing analog signals (AI/AO)
Support partial signal redundancy or status feedback function
3、 Typical application areas
Process Control (Etch/CVD)
Control the start/stop of components such as gas panels, heaters, cooling fans, vacuum pumps, etc
Collect input signals such as temperature switch, door lock status, sensor alarm, and chamber vacuum status
Automated transportation system
Control the motion commands of robotic arms, conveyor belts, lifting platforms, etc
Receive status feedback signals such as position, limit, and air pressure
Alarm and interlocking system
Output sound and light alarm
Execute emergency shutdown, interlock protection and other action control
4、 Technical characteristics (typical)
Multi channel digital input/output design (such as 16DI+16DO)
The analog channel supports 0-10V and 4-20mA signals (such as compatible flow meters and temperature controllers)
Industrial standard interface, compatible with various types of field devices
Optoelectronic isolation design to prevent external interference or overvoltage from affecting the main control system
Plug in or backplane installation, easy to replace and maintain
Can support functions such as error detection, self diagnosis, and communication status monitoring
Product details picture:
CX81-050023-12
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