TEL Tokyo Electron CX81-50007-12 Digital Control Board

Brand:TEL Tokyo Electron
Model:CX81-50007-12
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron CX81-50007-12 Digital Control Board

Product manual:

1、 Basic Information
Product Model: CX81-50007-12

Product Name: Digital I/O Control Board

Manufacturer: Tokyo Electron Limited (TEL, Tokyo Electronics, Japan)

Module type: Industrial grade digital input/output control board

Version number: -12 (indicating this is the 12th design or revision)

2、 Main functions
This control board belongs to the core module used for digital signal processing and control in the TEL system, and is responsible for the following tasks:

Functional category description
Digital input acquisition and reception buttons, limit switches, status feedback devices, and other switch signals
Digital output control drives digital actuators such as relays, solenoid valves, alarms, indicator lights, etc
I/O status monitoring collects real-time input/output channel status and provides feedback to the main control
Logic execution supports cooperation with the main control logic to participate in device process control and security interlock processing

3、 Application Fields
This digital control board is mainly used for action control and status feedback subsystems in TEL semiconductor equipment, commonly found in:

ACT series lithography pre-processing and post-processing equipment

Control the digital signal process of nozzle lifting, chamber door opening and closing, hot plate positioning, wafer detection, etc

Tactras/Trias series etching or deposition equipment

Control air valves, vacuum valves, cooling systems, RF power interlock circuits, etc

Transfer/Load Port System

Control the position locking and vacuum status confirmation of the wafer handling mechanism and other operational logic

4、 Board characteristics
Multi channel I/O design, suitable for complex system requirements

Industrial grade stability, supporting long-term high-frequency operation

Standard arrangement of signal interfaces, easy to integrate with the main control system

Version "-12" indicates that this control board has undergone multiple circuit optimizations and interface compatibility adjustments

Some channels may have LED status indication function for easy debugging and troubleshooting