TEL Tokyo Electron DS1187-029773-13 servo motor module

Product manual:

Product Name: Servo Motor Module
Manufacturer: Tokyo Electron Ltd, TEL）
Component classification: Motor control module/servo drive control subsystem

1、 Product Overview:
DS1187-029773-13 is a servo motor control module used in TEL semiconductor manufacturing equipment,
The main function of this module is to drive and control precision moving components,
Such as wafer transfer arm, lifting platform, wafer loading robot arm, rotating mechanism, etc.

This type of module is used in conjunction with the servo motor body to achieve precise positioning
Speed and acceleration control are commonly used in critical areas that require extremely high precision for repeated positioning.

2、 Main functions:
Functional category description
Motor control executes control commands such as start stop, steering, acceleration and deceleration of servo motors
The encoder feedback interface receives real-time data such as position and velocity returned by the encoder, achieving closed-loop control
Parameter configuration can set maximum speed, acceleration, PID control parameters, etc

3、 Possible technical parameters (based on the general specifications of TEL servo system):
Typical parameter range of the project
Drive mode: fully digital closed-loop servo control
Single axis or dual axis control (depending on the specific version)
Power input DC 24V/AC 100~240V (depending on equipment matching)
Compatible with TEL specific servo motors and brushless motors with encoder feedback
Position control accuracy in micrometers (determined by encoder resolution and transmission structure)
Customized communication protocols such as TEL, EtherCAT, RS-485, CANopen, etc. (depending on the device)

4、 Applicable equipment scope:
This module may be installed in the following TEL devices:

Coater/Developer: controls wafer rotation platform, spray/developer arm, etc

Etcher: Control the lifting mechanism and wafer loading system inside the chamber

CVD/PVD system: Control moving parts in the process room

Transfer module (EFEM/Load Port): controls robot arm, Z-axis lifting mechanism

Pre alignment system and alignment mechanism: achieving high-precision positioning actions

Product details picture:

DS1187-029773-13

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