TEL Tokyo Electron E244-000053-11 Printed Circuit Board

Product manual:

1、 Basic Information
Product Model: E244-000053-11

Product Name: Printed Circuit Board (PCB)

Manufacturer: Tokyo Electron Ltd

System: Used for the control and signal subsystem in TEL semiconductor manufacturing equipment

Typical equipment series: may be applied to Etch (etching) equipment, CVD (chemical vapor deposition) Photoresist Stripper、 Vacuum processing machines, etc

2、 Functional positioning
Control signal processing

Undertake signal reception, forwarding, isolation, or preliminary processing tasks from the main control system.

data communication interface

As a communication bridge between various control sub modules (such as sensors, actuators, valve control units) and the host.

Signal conditioning and distribution

Adjust levels, voltages, pulse signals, etc., and distribute them to downstream components or upload them to the main control board.

Integration of auxiliary functions

It may include auxiliary functions such as relay control, indication circuit, diagnostic feedback, etc.

3、 Application Fields
Semiconductor process equipment control system

Provide signal management and inter board connectivity support in devices such as TEL Telius, Unity, Trias, and Alpha series.

Temperature control/air pressure/chemical flow subsystem

Used for monitoring temperature sensors, flow control, valve drive, vacuum control and other modules.

Sub logic control unit of dry etching or deposition equipment

Operates in conjunction with valve groups, electromagnetic drivers, vacuum pump monitoring, and other components.

4、 Technical characteristics (typical)
Industrial grade multi-layer PCB board, supporting complex signal wiring and stable operation

Anti electromagnetic interference design, suitable for high-frequency and high-speed equipment environments

Multiple connection methods: supports standard connectors, ribbon cables, BNC or flat cable connections

State feedback mechanism: Some boards contain LED status indicators, test points, etc. for easy maintenance

Product details picture:

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