TEL Tokyo Electron E249-000001-11 tactile scanner

Product manual:

1、 Product functional positioning
E249-000001-11 tactile scanner
It is a high-precision surface scanning and contact sensing device integrated into TEL semiconductor equipment system,
Usually used to detect the physical state of wafer or material surfaces, such as morphology deviation, position calibration, warping, contact pressure, etc.
This module, combined with a robotic arm or scanning platform, is used for scanning and detecting the target surface or collecting tactile feedback before and after the process or during the loading process.

2、 Main application areas
1. Wafer loading and positioning alignment
Application devices:

Wafer handling unit (load port)

Automated Alignment System (Aligner)

Detection submodule in Transfer Arm system

Function Description:

During the wafer loading process, the tactile scanner checks whether the wafer is correctly placed on the alignment table or chuck;

Determine whether there are issues such as offset, flip, misalignment, or missing pieces;

Collaborate with the visual system to improve handling accuracy and equipment operational safety.

2. Surface warping and flatness scanning detection
Testing content:

The degree of local warping of wafers or glass substrates;

Surface curvature or edge undulation;

Can be linked with pressure sensing feedback for physical measurement (such as micro contact height difference);

Application scenarios:

Confirm whether the surface flatness is within a controllable range before ALD, PVD, CMP, Etch and other processes to avoid subsequent process failures.

3. Pressure feedback monitoring of probe contact or alignment platform
Collaboration module:

Precision probe station or alignment platform

Detection probe in process chamber loading system

Functional features:

Check whether the probe is in gentle contact with the wafer to prevent damage;

Monitor the positioning of the robotic arm for overvoltage and protect the wafer and end effector.

Product details picture:

E249-000001-11

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