TEL Tokyo Electron E281-000016-41 Controller Module

Product manual:

Product model: E281-000016-41
Manufacturer: Tokyo Electron Ltd. (TEL)
Component Category: Control Core Unit/Embedded Control Board/Process Subsystem Control Module

1、 Product Overview:
E281-000016-41 is a controller module used inside TEL semiconductor equipment,
Its function is to act as the "main control unit" of a subsystem, by receiving instructions from the upper system,
Complete control tasks for specific processes or equipment components.

2、 Functional features:
Function Type Function Description
Signal acquisition receives digital/analog input signals, such as temperature, pressure, position, and other feedback signals
Output control sends out switch control PWM、 Simulate voltage and other control signals to actuators such as valves, motors, pumps, etc
Process logic execution with built-in or loaded TEL dedicated control logic program to achieve precise process control

3、 Technical specifications (presumably based on universal design of TEL control module):
Project parameters or description
Control Architecture Embedded CPU/FPGA/Dedicated SoC Control Core
Input interface: Multi channel DI (switch input), AI (analog input) interface
Output interface DO output, analog control output (0-10V, PWM, etc.)
Communication methods may support RS-232C, EtherCAT, CANopen, TEL specific protocols
Stability design EMC anti-interference, power isolation, anti-static design
Installation method: Plug in control backplane or independent installation module (with mounting holes or rails)

4、 Typical application system:
This module is commonly used to control the following subsystems:

Application module controls content
The wafer transfer arm control unit controls wafer picking and placing, XY movement, rotation, and Z-axis lifting and lowering
Vacuum system control and management: switching and feedback collection of vacuum pumps, valves, and gas channels
The temperature control system controls the heating plate, cooling circulation pump, and temperature feedback closed-loop control
The safety interlock system is linked to safety measures such as door locks, emergency stops, and power partitions
Process execution control accurately synchronizes multiple process flows, such as coating, developing, heating, cooling, etc

Product details picture:

E281-000016-41

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