TEL Tokyo Electron EC08-000007-11 Control Pulse Card

Product manual:

TEL Tokyo Electron EC08-000007-11 Control Pulse Card
It is an electronic module used in TEL semiconductor manufacturing equipment for precise pulse signal generation and control,
Widely used in key fields such as motion control, step execution, and timing management of devices.

1、 Basic Information
Product Name: Control Pulse Card

Model: EC08-000007-11

Manufacturer: Tokyo Electron Ltd. (TEL)

Module type: Pulse signal generation and control module

Application areas: equipment motion control, drive pulse generation, automated timing control

2、 Main functions
Pulse signal output

Generate precise pulse sequences for driving actuators such as stepper motors and servo drives.

Support multiple pulse frequencies and pulse width adjustments to meet different driving requirements.

synchronization

Collaborate with the main control system to achieve multi axis synchronous motion and precise timing control.

Ensure the accuracy of device actions and repeat positioning precision.

Signal conversion and amplification

Convert the control signal emitted by the main controller into a pulse level suitable for the actuator to receive.

Provide isolation and buffering to prevent interference and signal attenuation.

Interface compatibility

Adapt to the standard communication and control interfaces of TEL devices to achieve rapid integration.

3、 Typical application areas
Wafer Handling System
Control the stepper motor of the robotic arm to accurately position the wafer.

Rotation and positioning control in lithography equipment
Generate pulse signals to control the adhesive rotation platform or exposure positioning mechanism.

Etching and deposition equipment motion unit
Drive valve adjustment mechanism, shutter control, and sample stage movement.

Product details picture:

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