TEL Tokyo Electron EC81-000007-11 Control Unit Module

Product manual:

Product Name: EC81-000007-11 Control Unit Module
Alias: TEB405-1/FD2 Control Circuit Board
Manufacturer: Tokyo Electron Ltd
Product Type: Control Logic Module/Control Core PCB

1、 Product Function Description
This module is a circuit board with integrated control functions, used for the core control system in Tokyo Electron semiconductor equipment. Its functions mainly focus on the following aspects:

Central Control Processing

As part of the main control system, coordinate the start stop logic of various components in the equipment, such as air valves, vacuum pumps, heaters, etc.

Execute the set control program, including process parameter setting, state switching, and alarm interlock logic.

Signal center forwarding

Receive command signals from the upper computer (host) or operation panel and convert them into internal control signals of the device.

Collaborate with other control modules through system bus or serial communication protocol.

Equipment operation status monitoring

Real time collection of the status of various interface modules or sensors, and feedback to the main control system.

Support module level fault detection and self checking functions.

2、 Typical application areas
Tokyo Electronics UNITY II series etching equipment

As the core control module in this series, it undertakes the process control function of the entire device.

Control key units such as vacuum chambers, plasma systems, cooling systems, etc.

TEL wafer processing equipment

Can be used as a control board in CVD, ALD, and post-processing equipment.

Process Control Center Logic Board

Suitable for core operations such as control timing, protection logic, and communication exchange in precision process equipment.

3、 Main technical characteristics
Multi channel control and acquisition interface

Onboard signal amplification, level conversion, status indication

Compatible with TEL internal control bus architecture

Support module level hot swappable and replaceable design

May have a configuration memory for setting parameters and saving them

Product details picture:

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