TEL Tokyo Electron EC81-000016-11 Circuit Board

Product manual:

TEL Tokyo Electron EC81-000016-11 Circuit Board
It is a specialized functional board used in TEL semiconductor equipment, widely used in equipment control systems, communication interfaces, or I/O management.
This model number belongs to TEL's EC81 series and is typically used for integrating electrical control, communication management, equipment interlocking, and other functions.

1、 Basic Information
Project Content
Product Name: Circuit Board/PCB Assembly
Product model EC81-000016-11
Manufacturer Tokyo Electron Ltd. (TEL)
Category Control/Communication/Signal Management Function Board

2、 Possible functions (speculated based on the EC81 series functional structure)

Function Category Function Description
The signal processing function amplifies, filters, or converts signals from sensors, actuators, relay boards, etc.
The communication bridge serves as a communication bridge between the main control system and lower level modules, supporting RS-232, RS-485, or TEL proprietary protocols.
I/O interface management provides digital/analog input/output interfaces for controlling devices such as pumps, valves, heaters, etc.
The control logic unit is embedded with simple control logic (such as state switching, timing control) for distributed control.

3、 Typical application areas
EC81-000016-11 circuit board is commonly used in the following TEL systems:

1. Wafer processing system
Used in modules such as cleaning, developing, and gluing to control liquid flow and valve action.

2. Vacuum system
Control subsystems such as vacuum pump, chamber pressure sensor, vacuum valve, etc.

3. Temperature and Heating Control
Manage the temperature sampling and closed-loop regulation logic of heating elements.

4. Interlocking/safety system within the device
Collect signals from door locks, chamber covers, photoelectric sensors, etc. to achieve interlocking control.

Product details picture:

EC81-000016-11

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