TEL Tokyo Electron EC81-000053-11 Digital Control Board

Product manual:

TEL Tokyo Electron EC81-000053-11 Digital I/O Control Board
It is one of the key control modules used in TEL semiconductor equipment, responsible for processing and executing control tasks of digital input/output signals.
This board is widely deployed in multiple core equipment systems of TEL, especially for executing mechanical linkage
Equipment status monitoring, safety interlocking, and process logic control.

1、 Basic Information
Product Name: Digital Control Board

Product model: EC81-000053-11

Manufacturer: Tokyo Electron Ltd. (TEL)

Board type: Digital I/O Board

Deployment location: In the equipment control cabinet or module control system

2、 Main functions
Digital Signal Input Processing (DI)

Receive switch signals from external devices such as sensors, limit switches, buttons, relays, etc;

Determine the operational status, physical location status, or process triggering conditions of the equipment.

Digital Signal Output Control (DO)

Output control signals to actuators such as relays, pneumatic valves, electromagnetic locks, indicator lights, etc;

Used for equipment action control, status feedback, or safety interlock output.

State monitoring and logic control

Collaborate with the main controller (PLC/embedded system) to implement tasks such as process logic, fault response, and automatic switching.

Communication and synchronization

Communicate with the main control system through the backplane bus or dedicated control bus to participate in synchronous operation of multiple modules.

Product details picture:

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