TEL Tokyo Electron EPC-T0091A-11 Input/Output Module

Product manual:

1、 Function Overview
The EPC-T0091A-11 input/output module is a key component of the control system in TEL semiconductor equipment,
Mainly used for transmitting and converting signals between the main control system and device execution/detection components. Its core functions include:

Receive various input signals from sensors (such as photoelectric, limit, temperature, pressure, etc.)

Output control signals to actuators (such as relays, solenoid valves, motor drivers, etc.)

Implement interlocking judgment, alarm triggering, signal relay, and status feedback in control logic

Participate in equipment automation process control as part of TEL EPC series control platform

2、 Typical application areas
This I/O module is widely used in the following control areas of various TEL devices:

1. Wafer Transfer System
Manage sensors and motor signals for robotic arms, platforms, and rotating axes

Realize multi-point detection and action control on the transportation path

2. Gas/Chemical Handling System
Collect input signals from MFC, pressure sensors, liquid level switches, etc

Output control signals to solenoid valves, pumps, and gas distribution devices

3. Vacuum system and Loadlock area
Detect vacuum status, gate position, temperature, and alarm conditions

Control vacuum valve switches, electric heating elements, etc

4. Cleaning/Litho Support System (Wet Station/Litho Support)
Real time management of equipment sub functions such as spraying, drying, and rotating platforms

Maintain precise control output under multivariate process conditions

Product details picture:

More related products:

UNIROL10103BHE035301R0001Excitationcontroller

6ES7313-5BF03-0AB0CPUmodule

FANUC A06B-6102-H222 # H520 servo amplifier

More product recommendations:

DEIF LSU-113DG voltage regulator

AFP9075355 3BHS537443 voltage regulator

ASEA DSCA121 Robot Control Board