TEL Tokyo Electron FPC-T0097A-11 Fan Control Module

Brand:TEL Tokyo Electron
Model:FPC-T0097A-11
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron FPC-T0097A-11 Fan Control Module

Product manual:

Product Name: FPC-T0097A-11 Fan Control Module
Manufacturer: Tokyo Electron Ltd
Product type: Fan Power Controller Module

1、 Product Overview
FPC-T0097A-11 is a fan control module specifically designed for Tokyo Electron semiconductor devices, used to manage, regulate, and monitor the operational status of cooling fans inside the device. This module ensures that the forced air cooling units in each subsystem operate as needed to maintain the equipment operating within the specified temperature range.

2、 Core functions
Fan power supply and start-up control

Provide independent or centralized power control for multiple cooling fans, starting and stopping according to set timing or temperature control signals.

Speed regulation function

Support PWM (Pulse Width Modulation) or voltage control to achieve fan speed regulation, optimize heat dissipation and energy consumption.

Fan status feedback

Monitor the operating status of each fan, such as speed, faults, and shutdown alarms, and provide feedback to the main control system.

Multi channel fan management

Manage multiple fan channels (such as 2-8 channels) to adapt to complex cooling structure requirements.

3、 Typical application devices
The FPC-T0097A-11 fan control module is suitable for the cooling system of the following Tokyo Electron devices:

Etcher series etching equipment

CVD/PVD thin film deposition system

Coater/Developer coating and developing equipment

Vacuum pump station, dry pump auxiliary cooling unit

Electrical control cabinet, power module cooling subsystem

4、 Technical parameters (general valuation)
Parameter item description
Power input 24V DC (common)
Fan control channel supports multi-channel control (commonly 2-8 channels)
Output control mode: switch output/PWM/linear adjustment
State detection includes monitoring of fan speed, feedback on operating status, etc
Alarm output fan fault alarm signal output interface
Interface type: plug connector/slot interface/LED indicator light