TEL Tokyo Electron LSC-6230-S3-11 Liquid Source Controller

Brand:TEL Tokyo Electron
Model: LSC-6230-S3-11
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron LSC-6230-S3-11 Liquid Source Controller

Product manual:

Product Name:
TEL Tokyo Electron LSC-6230-S3-11 Liquid Source Controller

Product Overview:
LSC-6230-S3-11 is a liquid source controller used by Tokyo Electron (TEL) and produced by STEC,
Mainly used for gasification and supply control of liquid chemicals in semiconductor manufacturing equipment.
It belongs to the TEL Alpha series or other front-end process equipment (such as chemical vapor deposition systems)
An important component of the liquid source module.

Application areas:
1. Semiconductor thin film deposition equipment (CVD, MOCVD)
LSC-6230-S3-11 is used to control the transportation of liquid precursors (such as TEOS, TDMAT, TMP) into the reaction chamber after heating and gasification,
It is one of the core components of chemical vapor deposition (CVD) or metal organic CVD (MOCVD) equipment.

2. Precise supply of liquid precursors
This controller has multi-channel temperature control and flow control functions, supporting high-precision and stable output of trace liquids,
Suitable for semiconductor production processes that require extremely high process consistency.

3. Liquid gasification and transportation system matching
LSC-6230-S3-11 is often combined with a liquid vaporizer, constant temperature heater, pump, mass flow controller, and other components to form a complete liquid source system,
To jointly ensure the gasification efficiency and transportation stability of chemicals during the transportation process.

4. Automation system control integration
This controller supports communication with upper computer systems (such as main control computers and PLCs) and can respond to production process control signals,
Realize synchronous operation with process steps, widely used in highly automated equipment platforms.

Summary:
The LSC-6230-S3-11 liquid source controller is an important module used for liquid chemical control in TEL semiconductor equipment, widely used in:

Chemical vapor deposition processes (CVD, MOCVD)

Liquid precursor supply system

Automated chemical conveying module

Integrated system of liquid gasification and temperature control

Replacement or expansion of system modules in TEL original equipment