TEL Tokyo Electron MB3M36-050151-11 Vacuum Gauge

Brand:TEL Tokyo Electron
Model:MB3M36-050151-11
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron MB3M36-050151-11 Vacuum Gauge

Product manual:

1、 Product functional positioning
MB3M36-050151-11 vacuum gauge is a precision instrument used for measuring and monitoring the pressure of vacuum environments,
Widely integrated into Tokyo Electron semiconductor equipment.
Its main responsibility is to provide real-time feedback on the pressure status in the vacuum chamber or gas system,
Ensure that the process operates under ideal pressure conditions.

2、 Main application areas
1. Vacuum state monitoring of semiconductor manufacturing equipment
Application device type:

Etcher (Etcher)

Chemical vapor deposition equipment (CVD, ALD)

Cleaning system, vacuum load lock, chamber reaction system, etc

Function Description:
Accurate measurement from atmospheric pressure to ultra-high vacuum (10 ⁻⁶ Pa) can be achieved by connecting to the reaction chamber, pre pump, turbo pump inlet, or vacuum pipeline.

2. Core sensors of process vacuum control closed-loop system
Linkage with the system:
Collaborate with vacuum controllers and exhaust systems (such as turbo molecular pumps and dry pumps) to form a closed-loop control loop, achieving automatic pumping, stabilization, and deflation.

Pressure setting threshold trigger:
The pump system can be started/stopped within the set pressure range, or linked to a valve control unit.

3. Multi stage vacuum system pressure level division monitoring
Typical pressure monitoring points:

Primary vacuum (pre pump area)

Medium vacuum (pump suction port)

High vacuum (core area of reaction chamber)

Multi sensor network:
Multiple vacuum gauges work simultaneously to monitor the pressure distribution of the entire system from rough pumping to fine pumping.