TEL Tokyo Electron MPC-T0048A-11 Input/Output Module

Product manual:

TEL Tokyo Electron MPC-T0048A-11 Input/Output Module
It is an I/O (Input/Output) control component used in Tokyo Electron semiconductor manufacturing equipment,
Widely used for signal acquisition and equipment linkage control in various automated process flows.
The following is a detailed explanation without patterns:

1、 Basic Information
Product model: MPC-T0048A-11

Product Name: I/O Module

Manufacturer: Tokyo Electron Ltd. (TEL)

Function category: Digital/Analog Input/Output Interface Board

2、 Main functions
Signal acquisition and control

Collect input signals from external devices such as sensors, limit switches, optoelectronic devices, etc;

Output control command signals to actuators (solenoid valves, relays, servo drives, etc.).

Equipment linkage coordination

As an interface bridge between multiple subsystems in process equipment, such as gas, vacuum, motion platform, temperature control system, etc;

Control the start stop, sequential logic, and status feedback of each link to ensure synchronous execution of the process.

The interface signal standard supports multiple levels: 24V/TTL/OC, etc.

Security and status monitoring

Cooperate with the system for fault detection, emergency shutdown linkage, safety interlock and other control logic;

Can be configured as a redundant circuit or an automatic reset control circuit to improve equipment safety and reliability.

3、 Typical application scenarios
Plasma Etcher

Control digital devices such as gas on/off, pump valve on/off, and chamber door lock linkage.

CVD/ALD deposition equipment

Manage the input and output control signals of reaction gas valves, inlet and outlet devices, and preheating control devices.

Photolithography pre-processing unit

Control platform movement, vacuum adsorption device, mechanical arm input feedback and other operational components.

Wafer Transfer System (EFEM, Load Port)

Key actions and position confirmation such as monitoring access control switches, card holder positioning, and alignment platforms.

Product details picture:

MPC-T0048A-11

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