TEL Tokyo Electron MPC-T0070A-12 Input/Output Module

Brand:TEL Tokyo Electron
Model:MPC-T0070A-12
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron MPC-T0070A-12 Input/Output Module

Product manual:

Product model: TEL Tokyo Electron MPC-T0070A-12
Type: I/O Module
Functional positioning: Signal communication interface component between control system and on-site equipment

1、 Product Function Overview:
MPC-T0070A-12 is an industrial grade I/O module used in Tokyo Electron semiconductor equipment,
Used to achieve input and output signal interaction between the main control system (such as control motherboard, PLC, embedded control unit) and various execution components and sensors.
This module is usually installed in the equipment backplane or control rack as a bridge for signal conversion and data acquisition.

2、 Typical application areas:
Semiconductor manufacturing equipment control system

Etching machines and deposition equipment (CVD/PVD) installed on TEL
Control valves, pumps, sensors, motors and other on-site equipment in diffusion furnaces, cleaning equipment, etc.

Interface between digital and analog signals

Equipped with multiple DI (digital input), DO (digital output), AI (analog input), AO (analog output) channels,
Used for collecting and issuing control signals for the status of various subsystems of the device.

Wafer handling and positioning system

Used for motion control and position feedback of wafer transfer arms, aligners, and sorting units,
For example, motor control, photoelectric sensing, limit switch feedback, etc.

Process parameter monitoring

Support input collection and alarm judgment of key process parameters such as temperature, pressure, and gas flow rate,
Ensure the accuracy and safety of process execution.

Modular control system interface

Used for boundary signal processing between modular systems, such as data synchronization and logical judgment between different rack controllers.

Remote diagnosis and maintenance interface

By using this module to collect device operating status and error codes,
Support the upper computer diagnostic system to achieve remote alarm, fault analysis, and maintenance reminder functions.