TEL Tokyo Electron RPC-T0051A-11 Input/Output Module

Product manual:

TEL Tokyo Electron RPC-T0051A-11 Input/Output Module
It is an I/O signal control board used in semiconductor manufacturing equipment and is one of the key electronic modules of Tokyo Electronics Corporation's equipment.

1、 Product Features
Signal transmission and logic control

Realize the control signal output of the control system for equipment actuators (such as motors, cylinders, valves, etc.);

Receive input signals from sensors or device status feedback components and upload them to the main controller.

Electrical isolation and protection

Equipped with electrical isolation function, it can effectively protect the main control circuit from external signal interference or overload effects;

Provide basic protection functions such as overcurrent and overvoltage to ensure stable operation of the equipment.

Modular interface

Using standard interfaces for easy installation, replacement, or maintenance;

Support multi-channel input and output, adapt to complex control requirements.

2、 Application Fields
Wafer pre-processing equipment

Commonly used in TEL's Clean Track, ACT, Lithium and other series of equipment;

Used for controlling and monitoring processes such as gluing, developing, and cleaning.

automatic control system

Used for signal control and feedback of moving parts in equipment, such as robotic arms and conveyor mechanisms;

Control the operation of auxiliary equipment such as vacuum systems, pressure valves, door locks, etc.

Semiconductor manufacturing factory

Operate as the core control module in 12 inch and 8-inch wafer production lines;

Supports high load operation 24/7, with high requirements for environmental stability.

Equipment maintenance and upgrade

As a vulnerable electronic module, it can be independently replaced in the event of communication or control failures in the system;

Support continuous maintenance and technical extension of the service life of old model devices.

Product details picture:

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