TEL Tokyo Electron SPC-T0040A-11 Circuit Board

Brand:TEL Tokyo Electron
Model:SPC-T0040A-11
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron SPC-T0040A-11 Circuit Board

Product manual:

The TEL Tokyo Electron SPC-T0040A-11 circuit board is a specialized electronic module in Tokyo Electron semiconductor equipment,
Commonly seen in its preceding or succeeding process systems, such as adhesive coating and development CVD、 In etching and other equipment,
Used to support device control and signal processing functions.

1、 Basic Information
Product model: SPC-T0040A-11

Product Type: Control or Interface Circuit Board

Manufacturer: TEL (Tokyo Electron Limited)

Main purpose: Processing control signals, interface conversion, or executing component control in TEL equipment

2、 Functional Features
Functional category description
The control function receives instructions from the main control system and drives subsystems such as motors, valves, electromagnetic devices, etc
The signal interface exchanges data or status signals with the upper control board (such as CPU board)
Voltage/current management provides a stable signal voltage channel with functions such as current limiting and protection
Device communication bridging establishes communication channels between multiple subsystems to ensure collaborative operation of the system

3、 Typical application areas
Photolithography pre-processing and post-processing system (Coater/Developer)

Control the execution modules such as the rotating platform, vacuum clamping, and developer spraying system.

CVD/PVD thin film deposition system

Used to adjust process parameters such as temperature, gas flow rate, plasma power control, etc.

Etcher equipment

Control parameters such as gas switching and chamber pressure during plasma etching process.

Vacuum transmission system

Control the vacuum door, vacuum pump interlock logic, etc.