TEL Tokyo Electron SR5039-000614-11 power module

Product manual:

TEL Tokyo Electron SR5039-000614-11 power module
It is a specialized regulated power supply unit used in TEL semiconductor equipment,
Mainly used to provide safe and stable DC power output for critical control systems, drive circuits, and signal processing units of equipment.
It is the power basic guarantee component that maintains the normal operation of various electronic modules in TEL equipment.

1、 Basic Information
Product Name: Power Supply Unit

Product model: SR5039-000614-11

Manufacturer: Tokyo Electron Ltd. (TEL)

Product Type: Isolated/Stabilized DC Power Module

Typical deployment locations: main control cabinet, power distribution rack, subsystem power slot

2、 Main functions
Voltage Conversion and Stable Voltage Output

Convert AC or DC input to multiple stable DC outputs required for TEL system (such as+5V,+12V,+24V, etc.).

Accurate power supply supports subsystems such as logic boards, I/O modules, driver circuits, sensors, etc.

Overload and abnormal protection

Equipped with automatic protection capabilities such as overvoltage, overcurrent, short circuit, and overheating, ensuring the safe operation of the equipment.

The output circuit has electrical isolation function, effectively preventing interference coupling and system damage.

Support modular replacement and maintenance

Adopting a pluggable or screw on structure, it facilitates quick on-site replacement and system maintenance.

3、 Typical application devices (schematic)
Function and role of application device type
The Etcher system supplies power to the RF control board, vacuum valve control module, and sensor board
CVD/ALD system drives heating plates, chemical source valves, flow control units, etc
Track system provides power supply for light source control board, motor control, temperature control circuit
Mechanical arm controller, adsorption detection, and power supply support for the driving circuit of the handling machinery unit

Product details picture:

SR5039-000614-11

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