TEL Tokyo Electron TA3002-800107-01 UV Light Box

Brand:TEL Tokyo Electron
Model:TA3002-800107-01
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron TA3002-800107-01 UV Light Box

Product manual:

Product model: TA3002-800107-01
Name: Ultraviolet (UV) Light Box
Manufacturer: Tokyo Electron Ltd. (TEL)
Component category: Light source module/UV irradiation unit

1、 Product Overview:
TA3002-800107-01 UV Light Box
It is a key light source module used in photolithography, exposure, or cleaning processes in Tokyo Electron semiconductor equipment.
This lightbox emits ultraviolet light of a specific wavelength,
Realize the exposure or photochemical reaction of photosensitive materials on the wafer surface to ensure high-precision process control.

This module is designed to meet high stability and uniformity requirements, ensuring consistent light intensity and equipment safety during the manufacturing process.

2、 Main functions:
Function module description
Ultraviolet emission emits a specific wavelength (usually UV-C or UV-V band) of ultraviolet light beam
Uniform design of light source distribution to ensure uniform light intensity in the illuminated area
Temperature control with built-in cooling device or fan to maintain stable operating temperature of the lightbox
Safety protection equipped with anti UV leakage and electrical protection measures
Interface compatibility allows for connection with device control systems, enabling switch and status monitoring

3、 Technical parameters (typical indicators reference):
Project parameter description
Emission wavelength 254 nm (common UV-C band) or other specified band
The light intensity is measured in mW/cm ² to ensure process requirements
Lamp type: fluorescent tube or LED ultraviolet lamp
The power requirement is 220V AC or 24V DC, depending on the specific design
The service life is approximately thousands to tens of thousands of hours
The size specifications are customized according to the equipment design and adapted to the installation position

4、 Application areas:
Semiconductor wafer lithography exposure

Uniform irradiation and curing of photosensitive materials

Surface cleaning and photochemical treatment

Stable control and optimization of process parameters