TEL Tokyo Electron TF316925-006 Regulator

Brand:TEL Tokyo Electron
Model:TF316925-006
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron TF316925-006 Regulator

Product manual:

1、 Basic Information
Product model: TF316925-006

Product Name: Controller or Regulator Module

Manufacturer: Tokyo Electron Ltd

Category: Process parameter monitoring and adjustment module

Application equipment: Widely used in semiconductor manufacturing equipment of Tokyo Electron, mainly for real-time control and monitoring of process parameters.

2、 Functional positioning
Process parameter supervision

Real time monitoring of key process parameters such as gas flow rate, pressure, temperature, vacuum degree, etc.

Automatically adjust relevant equipment components (valves, pumps, heaters, etc.) according to the set threshold to maintain process stability.

Signal acquisition and feedback

Collect analog or digital signals from sensors, filter and amplify the signals.

Feedback real-time status and abnormal alarms to the main control system or upper computer.

Safety protection function

There are alarm and limit thresholds, and interlock protection measures are implemented in case of abnormalities.

Ensure that equipment and processes operate within a safe range.

3、 Application Fields
Semiconductor process equipment

Gas supply regulation (such as MFC mass flow controller)

Vacuum system monitoring