TEL Tokyo Electron XPC-T0068A-11 Connection Arm Module

Brand:TEL Tokyo Electron
Model:XPC-T0068A-11
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron XPC-T0068A-11 Connection Arm Module

Product manual:

Product model: TEL Tokyo Electron XPC-T0068A-11
Type: Connection Arm Module/Robotic Arm Link Module
Functional positioning: Used as a connecting component between mechanical structures for transmission, handling, or support in semiconductor equipment

1、 Product Function Overview:
XPC-T0068A-11 connection arm module
It is a structural component developed by Tokyo Electron (TEL) specifically for its wafer handling or vacuum robotic arm systems,
Usually used as relay arms or connecting arm segments in robots or automated handling mechanisms,
Responsible for connecting the actuator, end effector, and drive source to support precise transmission, flexible rotation, and spatial displacement.

2、 Main application areas:
Wafer handling system

Used to transport wafers from one process chamber to another location
(such as being sent from the cleaning section to the etching chamber, or transferred from the load port to the vacuum chamber).

Mechanical arm system inside vacuum chamber

As part of the internal structure of the robotic arm, coupled with vacuum compatible motors and encoders,
Realize high-precision and dust-free mobile movements.

Modular mechanical transmission structure

Collaborate with multi joint robotic arm components to achieve multi degree of freedom trajectory control and process alignment.

Equipment spatial structure support

Serving as a bridge connecting multiple structural components while withstanding mechanical stress
Inertial impact during dynamic loads and equipment movement.

Equipment automation upgrade and maintenance

Provide standardized and easily replaceable mechanical interfaces, suitable for system maintenance, arm length adjustment, or functional module expansion.