Tokyo Electron 2L39-000039-25 Automatic Matcher

Product manual:

Tokyo Electron 2L39-000039-25 Automatic Matching Network
It is a key module used in semiconductor manufacturing equipment for radio frequency (RF) systems,
The main function is to automatically adjust the impedance matching between the RF power source and the load,
To optimize the efficiency of RF energy transmission, ensure process stability and equipment safety.

1、 Product functional positioning
Module type: Automatic impedance matching network

Main functions:

Real time detection of load impedance changes and automatic adjustment of matching circuit parameters;

Minimize reflected power and improve RF transmission efficiency to the greatest extent possible;

Protect the RF power source to prevent overload and malfunction;

Support multiple RF power levels to meet different process requirements.

2、 Main application areas
1. Plasma etching equipment
Maintain plasma stability and improve etching uniformity;

Automatically adapt to impedance fluctuations caused by process gas and chamber changes.

2. Chemical vapor deposition (CVD) and physical vapor deposition (PVD) equipment
Optimize RF energy input to improve film quality and consistency;

Support multi process parameter switching to enhance production flexibility.

3. Plasma enhanced processes (PECVD, RIE)
Realize fast automatic matching and reduce equipment debugging time;

Improve equipment operation efficiency and stability.

3、 Applicable device platform (example)
TEL device series application module
Automatic matching module in TEL Unity/Trias etching and deposition equipment
TEL Tactra/Indy series multifunctional RF system automatic matching unit
The RF automatic matching part of TEL Eagle/Clean Track high-end process equipment

Product details picture:

2L39-000039-25

More related products:

6ES7315-2AF00-0AB0StandardController

DS200RTBAG3AHC Digital Input/Output Unit

DSAI130A3BSE018292R1analoginputboard

More product recommendations:

GE D20 EME 10BASE-T Digital Control Modu

RADISYS 451558-004 Communication Module

ABB UN0942b-P Programmable Controller