Tokyo Electron 3208-000173-13 Interface Module

Product manual:

1. Internal signal and control communication hub of semiconductor equipment
Core function: The 3208-000173-13 interface module serves as a communication bridge between the control system and the execution module,
Realize the transmission and conversion of various signals (such as analog, digital, serial communication, etc.).

Application value: It ensures that commands from the upper controller can be accurately received and responded to by the underlying executing mechanism,
At the same time, feedback the device status information to the main control system.

2. Inter module connection and expansion platform
System integration: The interface module supports the integration of multiple control units
The power module, sensors, and actuators are connected into a unified system for easy centralized management.

Structural advantages: Modular design is easy to expand or upgrade,
The system architecture can be quickly adjusted according to changes in device configuration.

3. Support multiple industrial communication protocols
Communication capability: may support RS-232/RS-485
Industrial communication standards such as Ethernet, CAN, and I ² C enable high-speed and stable data exchange.

Strong adaptability: compatible with different types of controllers (PLC, industrial computer, customized control card)
Build a multi-level distributed control network with on-site equipment.

4. Typical application scenarios
Interface modules for main control systems such as lithography machines, CVD, Etcher, etc.:
Used to connect the main control board with units such as cavity control, motor drive, temperature control, gas flow control, etc.

Signal acquisition and status feedback system:

User interface and human-computer interaction interface: connecting touch screen and operation panel,
Implement local control and remote debugging of devices.

5. Stability and maintainability
Industrial grade stability: characterized by strong anti-interference ability, good electrical isolation, and high reliability,
Suitable for harsh environments such as clean rooms.

Easy to maintain: Supports hot swapping, easy replacement, and facilitates quick on-site maintenance and troubleshooting of equipment.

Product details picture:

3208-000173-13

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