Tokyo Electron 3397-2200047-2X chiller component

Brand:TEL Tokyo Electron
Model:3397-220047-2X
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Tokyo Electron 3397-2200047-2X chiller component

Product manual:

Tokyo Electron 3397-2200047-2X Chiller Unit
It is a thermal management subsystem specifically designed for TEL semiconductor manufacturing equipment,
Mainly used to control the temperature of key components in process equipment,
Ensure that it operates in a high-precision and high stability environment.
This component is typically integrated into high vacuum, high-temperature process platforms such as etching, deposition, and photolithography.

1、 Product Function Overview
Equipment type: chiller component (liquid cooling circulation unit)

Main functions:

Provide stable coolant temperature for the equipment;

Adjust the operating temperature of the cavity, heating plate, RF power supply, or laser light source;

Integrate with the main control system to achieve dynamic temperature control and abnormal alarm.

2、 Core application areas
1. Plasma Etcher
Cooling reaction chamber, substrate platform, and RF matching network;

Reduce the temperature of the cavity wall, suppress particle generation, and improve etching uniformity and yield.

2. CVD/ALD deposition equipment
Thermal management system for controlling deposition chambers, substrates, pipelines, etc;

Prevent material crystallization or uneven deposition, and improve film thickness consistency.

3. Photolithography system
Stable operating temperature of light source modules (such as lasers and LEDs);

Support thermal compensation and heat dissipation for exposure platforms and lens components.

4. Developing/cleaning equipment
Control the temperature of chemical liquids (such as developer, adhesive remover) or cleaning chambers;