Tokyo Electron 3895-120916-13 Slot Module

Product manual:

The slot module of Tokyo Electron 3895-120916-13 is designed by Tokyo Electron
A key module in semiconductor manufacturing equipment, mainly used for various internal controls, signal transmission, and function expansion.
The following are detailed product application instructions without patterns:

1、 Product positioning
Module type: Slot Module

Manufacturer: Tokyo Electron

Main function: As a module interface in the device control system, it is used to expand and connect other control boards or functional units.

2、 Main application areas
Semiconductor manufacturing equipment control system

Applied to the control architecture of various semiconductor process equipment such as etching machines, CVD, PVD, etc. in Tokyo Electron.

Provide modular slot interfaces for easy system expansion and maintenance.

Signal allocation and communication relay

Used for signal transmission and data exchange between various control units to ensure stable internal communication of the system.

Supports multiple communication protocols and bus interfaces.

Functional module integration platform

As a physical installation and connection platform for multiple functional modules such as sensor interfaces, driver control, logic processing, etc.

Support hot plugging and module replacement for easy on-site maintenance.

Key components of equipment system architecture

Participate in the architecture design of the equipment control system to enhance the scalability and system reliability of the equipment.

3、 Technical features
High reliability industrial grade design, suitable for semiconductor manufacturing environment.

Modular structure, supporting the insertion of multiple types of functional modules.

Strong compatibility, compatible with various device series of Tokyo Electron.

Good electromagnetic compatibility (EMC) and anti-interference performance.

Easy to maintain and quickly replace.

Product details picture:

3895-120916-13

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