Tokyo Electron 3D80-000214-V4 Controller Module

Product manual:

Tokyo Electron 3D80-000214-V4 Controller Module
It is an intelligent control component specifically designed for semiconductor manufacturing equipment,
Mainly used to implement internal process flow, subsystem management, and precise parameter control functions of equipment.
This module is one of the core control units in TEL (Tokyo Electron) high-end equipment platforms, such as etching, deposition, and other systems.

1、 Product functional positioning
Module Type: Process Controller/System Controller

Functional features:

Manage equipment operation logic, control instructions, and status monitoring;

Real time data exchange with the device control system;

Control the execution of subsystems such as gas flow rate, temperature, vacuum, pressure, RF power, etc;

Support functions such as external signal input and output, alarm response, and fault diagnosis.

2、 Application field analysis
Etch Systems etching equipment
Control the gas ratio, pressure control, and RF power output inside the chamber;

Manage the action logic of sub components such as cavity doors, lifting mechanisms, heating plates, etc;

Communicate with the upper MES system and equipment host (such as PLC or industrial PC).

2. Chemical vapor deposition equipment (CVD/ALD)
Real time control of sedimentation period and film thickness;

Adjust the precursor gas flow rate, temperature setting, and vacuum state;

Provide an interface for collecting process stability data.

3. Cleaning/developing equipment
Manage the processes of cleaning nozzles, water vapor ratio, motor movement, drying, etc;

Implement action sequence, time setting, and anomaly monitoring.

Product details picture:

3D80-000214-V4

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