Tokyo Electron 3M87-021335 Cooler Component

Product manual:

The Tokyo Electron 3M87-021335 Cooler Unit/Cooler Assembly is a temperature control component used in TEL semiconductor equipment,
The main function is to inspect key components such as cavities and power modules during complex manufacturing processes
Accurate cooling management is carried out for process gas or liquid circulation systems to ensure the thermal stability and process consistency of equipment operation.

1、 Product Function Overview
Type: Cooler component/Liquid cooling system subunit

Main functions:

Provide cooling for key units such as cavities, RF modules, light sources, heating platforms, etc;

Maintain the system temperature within the set range to prevent overheating;

Support temperature feedback control and multi-stage coolant flow rate adjustment.

2、 Typical application areas
Etch Systems etching equipment
Cooling the wall of the reaction chamber and controlling the temperature of the plasma environment;

Inhibit particle generation and improve etching accuracy.

2. CVD/ALD deposition equipment
Stabilize the temperature of the reaction chamber and precursor transport system to avoid material crystallization or deposition defects;

Control the temperature gradient to ensure the uniformity of the film layer.

3. Development/cleaning module
Provide support for liquid cooling and circulation systems such as developing solution, de sizing solution, DI water, etc;

Ensure that chemical reactions occur at appropriate temperatures to improve cleaning effectiveness.

4. RF power supply and laser light source cooling
Prevent overheating of electronic devices such as RF adapters and laser components;

Extend the lifespan of critical electronic components.

3、 Adaptation device platform (example)
Application location of device series
TEL Trias/Unity Pro cavity cooling, RF module temperature control
TEL Lithium/ACT8/12 development chamber or cleaning section cooling cycle

Product details picture:

3M87-021335

More related products:

DS200RTBAG3AHC Digital Input/Output Unit

DSAI130A3BSE018292R1analoginputboard

6ES7312-5BE03-0AB0LogicControllerModule

More product recommendations:

RADISYS 451558-004 Communication Module

ABB UN0942b-P Programmable Controller

Teknic SST-1500-XCX Digital Servo Drive