Tokyo Electron 3Z80-000604-11 Controller Box

Product manual:

Tokyo Electron 3Z80-000604-11 Controller Enclosure/Box
It is a chassis or housing unit used in TEL semiconductor equipment for installing and protecting control modules and their related electronic components.
It not only provides mechanical protection for the controller module, but also is responsible for heat dissipation, dust prevention, and electromagnetic shielding to ensure stable and reliable operation of the control system.

1、 Product functional positioning
Type: Controller Module Shell/Chassis

Main functions:

Protect the internal controller circuit board and electronic components from external mechanical damage, dust, and pollution;

Equipped with a heat dissipation structure to assist in temperature management of the controller and prevent overheating;

Support the installation, fixation, and layout of connection interfaces for control modules;

Provide electromagnetic interference (EMI) shielding to ensure signal stability.

2、 Application Fields
Control System Protection in Semiconductor Manufacturing Equipment

Controller installation box in key process equipment such as etching equipment and deposition equipment;

Ensure the safe and stable operation of control modules in clean rooms and industrial environments.

Maintenance and replacement support for control modules

Easy to disassemble and assemble quickly, supporting equipment maintenance and module replacement;

The structural design complies with the TEL modular specification.

Product details picture:

3Z80-000604-11

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