Tokyo Electron AQA-K09-TYP2 cooler assembly

Product manual:

The Tokyo Electron AQA-K09-TYP2 Chiller Unit/Cooling Assembly is a key component of the temperature control system used in TEL semiconductor manufacturing equipment,
Mainly responsible for providing precise temperature regulation and heat exchange functions for process modules such as reaction chambers, light sources, electronic components, etc., to ensure process stability and safe operation of equipment.

1、 Basic Product Attributes
Product Name: Chiller/Cooler Unit

Product model: AQA-K09-TYP2

Manufacturer: Tokyo Electron Ltd

Module purpose: Liquid or gas temperature control (may be an internal or external cooling module)

2、 Function and Function
Specific description of functional categories
Temperature control management controls the temperature of process modules, electronic systems, or liquid circuits to maintain it within a predetermined stable range
The heat exchange system utilizes circulating fluids such as refrigerant or DIW (deionized water) to remove heat and achieve continuous cooling
Connect the integrated control interface with the main control system of the equipment (such as PLC or temperature controller) to achieve temperature feedback closed-loop control
The process protection function prevents temperature drift from causing equipment overheating, cavity expansion, uneven film thickness, or damage to electrical components

3、 Typical application areas
Application module cooling purpose
Chamber cooling controls the temperature of the reaction chamber wall to avoid particle generation or uneven reaction
RF module cooling maintains stable operation of RF power devices, extending the lifespan of power supply and matching devices
Chemical/developer cooling system stabilizes liquid temperature, controls chemical reaction rate and ensures consistency with wafer surface treatment
The temperature control system of laser/light source components reduces wavelength drift or light intensity fluctuations caused by light source heating, and improves the quality of graphic imaging

Product details picture:

AQA-K09-TYP2

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