Tokyo Electron SBX08-00027-1 Ultrasonic Device

Product manual:

Tokyo Electron SBX08-000027-1 Ultrasonic Transformer/Cleaner Unit
It is a functional component used for ultrasonic cleaning or liquid processing modules in semiconductor processes,
Commonly used in applications such as cleaning, developing, pre etching cleaning, or high-precision material surface treatment.
This component is usually integrated into TEL's Wet Station or Clean Track series of developing machines.

1、 Product Function Overview
Equipment type: Ultrasonic cleaner/Ultrasonic cleaning head/Ultrasonic transducer

Main functions:

Realize contactless cleaning to ensure the integrity and cleanliness of the device structure;

Improve surface quality control before development or wet etching.

2、 Main application areas
1. Ultrasonic Wafer Cleaning
Used to remove particles, metal ions, and small pollutants from the surface of wafers;

Often used in conjunction with cleaning solutions such as deionized water (DIW), hydrofluoric acid (HF), and ozone water (SC1/SC2).

2. Post lithography development process
Remove residual photoresist and developer by-products;

Improve the cleanliness of graphic edges to avoid subsequent etching defects.

3. Cleaning after film deposition
Remove sediment residue or prevent pollutants from depositing at the edge of the wafer;

Can be used in the cleaning process of pre-processing or intermediate processing steps.

Product details picture:

SBX08-000027-1

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