TEL Tokyo Electron 2981-600534-1 Printed Circuit Board
Product manual:
TEL Tokyo Electron 2981-600534-1 Printed Circuit Board
It is a dedicated control board used in semiconductor manufacturing equipment, mainly responsible for signal acquisition of various subsystems inside the equipment
Control execution and communication management. This circuit board is mainly used in the following fields:
1、 Typical application device types
Dry etching equipment (Etcher)
Thin film deposition equipment (CVD, ALD, etc.)
Photoresist coating/developing equipment (Track System)
Wafer Cleaner
2、 Functional positioning
Control module: drives execution components such as solenoid valves, motors, temperature control units, etc
Signal processing: Collecting sensor signals, processing temperature, pressure, flow rate and other data
Communication interface: high-speed communication with the upper control system (such as the main control board and industrial computer)
Fault diagnosis: Record equipment operation data and support fault detection and alarm feedback
3、 Main application scenarios
Multi chamber coordinated control in wafer process section
Process environment monitoring and automation adjustment
Real time control of chemical supply system
High precision process parameter control before packaging
4、 Application advantages
Improve system control response speed and data transmission stability
Support multitasking parallel processing and modular expansion
Suitable for high standard industrial control environments in clean rooms
Product details picture:
2981-600534-1
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