TEL Tokyo Electron 3281-000138-12 Control Board
Product manual:
Product Name: 3281-000138-12 Control Board
Manufacturer: Tokyo Electron (TEL)
Product Type: Electronic Control Board Module
1、 Product Overview
The 3281-000138-12 control board is one of the control core components used in Tokyo electronic semiconductor equipment,
Mainly responsible for equipment logic control, signal processing, and communication coordination functions.
2、 Main functions
Control the operation process of equipment, such as switch control, action coordination, etc.
Receive and send digital/analog signals to achieve real-time control of on-site sensors and actuators.
Communicate with the upper system or main control computer to exchange status and parameter data.
Support device parameter setting, fault feedback, alarm linkage and other functions.
3、 Applicable equipment (may include)
TEL dry etching equipment
TEL polishing equipment (such as CMP), etc
4、 Technical characteristics (reference for general control board)
Input voltage: commonly 24V DC
Interface types: RS-232, 485, digital IO, analog IO (depending on version)
Processor: Embedded controller or FPGA
Installation method: Rack mounted slot or independent fixed installation
Communication support: may support TEL proprietary communication protocol
Product details picture:
3281-000138-12
More related products:
6ES7314-1AE02-0AB0CPUController
3BHL000391P0101Lowvoltapowersupplychip
SLN042IC086SLN042-APortUnmanadswitch
More product recommendations:
Bentley 330980-50-05 proximity sensor
