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TEL Tokyo Electron 3281-000172-13 Input/Output Interface

TEL Tokyo Electron 3281-000172-13 Input/Output Interface

Product manual:

Tokyo Electron 3281-000172-13 Input/Output Interface Module - Product Application Fields

This module is a key electronic component used by Tokyo Electron (TEL) in semiconductor manufacturing equipment,
Mainly responsible for the input and output signal interaction between the control system and on-site equipment. Its typical application areas include the following:

Semiconductor manufacturing equipment control system
Used in various semiconductor devices such as etching machines, CVD (chemical vapor deposition), PVD (physical vapor deposition), cleaning machines, and diffusion furnaces,
Implement digital/analog signal input and output for various sensors, actuators, solenoid valves, and other components in the process flow.

Internal signal integration interface of the device
As the main control board and peripheral functional modules (such as vacuum pump control, power monitoring, motion control system)
The data channel between them enables stable and fast data communication.

I/O Control in Automation Systems
Applied in TEL equipment automation control systems, such as vacuum chamber switch control
Scenarios such as gas flow regulation and power status monitoring.

Equipment status monitoring and remote diagnosis
Support input/output status collection, in conjunction with TEL upper computer diagnostic system for fault detection and preventive maintenance.

Wafer Handling and Processing System
Can be used to control wafer handling devices, alignment systems, or transfer systems,
Implement signal control and position confirmation feedback.

Expansion of cleanroom equipment interfaces
Suitable for modular production equipment located in clean environments,
Through this interface module, inter device module communication, environmental parameter acquisition, and signal synchronization are achieved.