TEL Tokyo Electron 381-500244-3 Memory Board

TEL Tokyo Electron 381-500244-3 Memory Board

Product manual:

TEL Tokyo Electron 381-500244-3 Memory Board
Product application field description:

1、 Application Fields
Main control system for semiconductor manufacturing equipment

Used as the main control unit in Tokyo Electron devices to assist in processing control commands and process programs.

Data caching and temporary storage

Temporarily cache image data, process formulas, sensor signals, etc. during device operation, supporting real-time response.

Equipment operation formula management

Store and call various process recipes to ensure fast and efficient switching between different process flows.

Alarm and status logging

The state changes and alarm information generated by device operation can be temporarily saved in memory for system call and maintenance analysis.

Data interaction support with human-machine interface (HMI)

Assist the HMI system in displaying device status and input/output operation results in real-time.

2、 Typical application devices
TEL etching equipment (such as Telius series)

TEL coating/developing equipment (such as Mark Vz series)

3、 Technical Features (Overview)
Industrial grade PCB memory board, suitable for high cleanliness and high temperature control environment

Connect with TEL main control module at high speed to perform temporary data processing tasks

Capable of multi-channel access, improving data throughput efficiency

High reliability, supporting long-term uninterrupted operation

Product details picture:

381-500244-3

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